Volume 6, No. 1, March 2018
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Sodium Chloride Concentration Measurement by Using Doping/Un-doping Poly-silicon Nanowire Device

Chang-Yuan Chen1, Cheng-Chih Hsu1, Chyan-Chyi Wu 2, Ching-Liang Dai 3
1. Department of Photonics Engineering, Yuan Ze University, 135, Yuan-Tung Road, Chung-Li, 32003 Taiwan.
2. Department of Mechanical and Electromechanical Engineering, Tamkang University, New Taipei 25137, Taiwan.
3. Department of Mechanical Engineering, National Chung Hsing University, Taichung 402, Taiwan.
Abstract: This work fabricates doping/un-doping poly-Si nanowire sensor with various lengths by using top-down technique for measuring salt concentration. Experimental results indicate that the resolution is proportional to the nanowire length and dopant concentration. But the sensitivity is inversely proportional to the length nanowire length. Moreover, the proposed sensor demonstrates 10 applications with similar current-time response and shows good repeatability.
Keywords: Sodium chloride concentration, nanowire device, n-type dopant, reusable.

Cite:Chang-Yuan Chen, Cheng-Chih Hsu, Chyan-Chyi Wu, Ching-Liang Dai, "Sodium Chloride Concentration Measurement by Using Doping/Un-doping Poly-silicon Nanowire Device," International Journal of Materials Science and Engineering, Vol. 6, No. 1, pp. 18-22, March 2018. doi: 10.17706/ijmse.2018.6.1.18-22

General Information

ISSN: 2315-4527
Editor-in-Chief: Prof. Emeritus Dato' Dr. Muhammad Yahaya
DOI: 10.17706/ijmse
Abstracting/ Indexing: Ulrich's Periodicals Directory, Google Scholar, Crossref
E-mail: ijmse@iap.org